Digital radiographic imaging arrays including patterned anti-static protective coating with systems and methods for using the same

ABSTRACT

Embodiments relate to detector imaging arrays with scintillators (e.g., scintillating phosphor screens) mounted to imaging arrays or radiographic detectors using the same. For example, the detector imaging arrays can include a scintillator, an imaging array comprising imaging pixels, where each imaging pixel comprises at least one readout element and one photosensor; and a first dielectric layer formed between the scintillator and the imaging layer, wherein the dielectric constant of the insulating layer is very low. Embodiments according to the application can include a second dielectric layer formed over at least a portion of the non-photosensitive regions of the array and/or a first dielectric layer, each with a dielectric constant.

TECHNICAL FIELD

The present application relates to radiographic imaging arrays. Morespecifically, the present application relates to indirect digitalradiographic imaging arrays and methods for using the same.

DESCRIPTION OF RELATED ART

An indirect digital radiographic (DR) detector can include ascintillator (e.g., phosphor scintillating screen) arranged in proximityto an imaging array sensitive to radiation emitted by the scintillatorupon absorption of X-rays or the like. In order to maintain highresolution, the scintillating screen can be mounted in contact with theimaging array or within about 20 microns of a surface of the imagingarray. Greater spacing between the imaging array and the scintillatorcan result in a loss of resolution. For example, this loss of resolutioncan occur because of multiple reflections of light between thescintillator and the active surface of the imaging array. In addition,greater spacing or non-uniform spacing can result in imagenon-uniformity because of non-uniformity in optical coupling between thescintillator and the imaging array.

Digital radiographic imaging arrays have been used in radiographicsettings in which a readiographic detector is mounted inside aPotter-Bucky grid (“bucky”), mounted at a positioning arm or moved fromone location to another (e.g., portable DR detectors). Portability canincrease an opportunity for a detector to be dropped or subjected toshock/vibration. In addition, for some portable imaging procedures, thepatient stands or lies on the detector, which can result in localizedregions of high pressure.

Scintillators can be deposited to (e.g., vacuum evaporation, coating) orattached to an imaging array. Two approaches have been used in therelated art to attach a scintillator to an imaging array. In the first,the scintillator can be placed in physical contact with the imagingarray using pressure between the non-active surface (e.g., substrate) ofthe imaging array and a substrate of the scintillator. The secondapproach uses one or more intermediary layers between the imaging arrayand the scintillator, for example, a planarization layer, an opticalmatching layer, an adhesive layer, etc., to attach the scintillator tothe imaging array in the detector.

The first approach can have various disadvantages. For example: 1)non-uniform optical contact between the scintillator and photosensingelements; 2) mechanical grinding; 3) lateral scattering of light becauseof reflections off the active surface of the imaging array and thesurface of the scintillator facing the active surface of the imagingarray can result in loss of resolution; 4) changing size of an air gapbecause a surface of the scintillator facing the active surface of theimaging array can include surface roughness on the order of severalmicrons and/or 5) change in position of the scintillator. Since theimaging array and scintillator can be calibrated for pixel-by-pixelgain, a change in position can result in photosensitivity pattern noisebecause of the calibration no longer being accurate. Also, poor opticalcoupling of the light from the scintillator to the imaging array canresult from optical index matching of an air gap (n=1) formed betweenthe scintillator and the imaging array. Further, changes in the opticalcoupling of the scintillator to the imaging array can occur whenpressure (e.g., localized) is placed on the scintillator resulting inlocalized hot spots since gain calibration is obtained without pressure.

Examples of the second approach can include a planarization layer astaught, for example, in US20080099687A1 (Konica), U.S. Pat. No.6,608,312B1 (Canon), and U.S. Pat. No. 6,770,885B2 (GE), all of whichare herein incorporated by reference in their entirety. A liquid indexmatching material as taught by, e.g., U.S. Pat. No. 6,469,305B2(Hamamatsu) also herein incorporated by reference in its entirety. Sucharranged layers can improve the optical coupling of the light betweenthe scintillator and the imaging array and can reduce the impact oflocalized pressure on the scintillator. JP2002055165A discloses using anadhesive material to bond the scintillator to the imaging array and U.S.Pat. No. 5,506,409A (Hitachi) discloses detector arrays using spacingbeads to maintain a precise separation distance between the scintillatorand the imaging array, which are also herein incorporated by referencein their entirety.

SUMMARY

Accordingly, it is an aspect of this application to address in whole orin part, at least the foregoing and other deficiencies in the relatedart.

It is another aspect of this application to provide in whole or in part,at least advantages described herein.

Another aspect of the application is to provide in whole or in partradiographic detector imaging arrays including high performance imagingcharacteristics that include imaging arrays.

Another aspect of the application is to provide in whole or in partdetector imaging arrays with scintillators (e.g., scintillating phosphorscreens) combined with imaging arrays. For example, detector arrays caninclude a layer between a scintillator and an imaging array to controlnoise or reduce noise for the imaging array. For example, the layer caninclude a low dielectric constant layer and/or an anti-static layer.

Another aspect of the application is to provide detector imaging arrayswith scintillators combined with imaging arrays using two or moreintermediate layers. For example, a detector can include scintillatorsmounted to imaging arrays using two or more low dielectric constantlayers. For example, a first low dielectric constant layer can betransparent and a second low dielectric constant layer can includenon-transparent or opaque materials (e.g., colorants). For example, asecond low dielectric constant layer can be at non-active locations foran active surface of the imaging array. Alternatively, a firstinsulating layer can be thick and a second insulating layer can be thin.

Another aspect of the application is to provide detector imaging arrayswith scintillating phosphor screens mounted to imaging arrays using atleast one intermediate layer such as a low dielectric constanttherebetween where additional layers can be added between thescintillator and the imaging array, including planarization layers,adhesive layers, optical matching layers, protective layers, etc.

Another aspect of the application is to provide detector imaging arrayswith scintillating phosphor screens combined with or proximate toimaging arrays using at least one intermediate layer such as aantistatic layer therebetween where additional layers can be addedbetween the scintillator and the imaging array, including planarizationlayers, adhesive layers, optical matching layers, protective layers,etc.

Another aspect of the application is to provide detector imaging arraysusing at least one antistatic layer thereover. Another aspect of theapplication is to provide detector imaging arrays with scintillatingphosphor screens combined with imaging arrays using at least oneantistatic layer therebetween. Exemplary antistatic layers can beelectrically coupled to conductive traces within the radiographicimaging array or within/adjacent imaging pixels of the radiographicimaging array.

Another aspect of the application is to provide detector imaging arraysusing at least one patterned antistatic layer thereover. A patternedantistatic layer can be electrically coupled to conductive traces withinthe radiographic imaging array or within/adjacent imaging pixels of theradiographic imaging array. For example, the antistat layer can includea colorant material.

In accordance with one embodiment, there can be provided a projectionradiographic imaging apparatus, that can include an insulatingsubstrate; an imaging array formed over the insulating substrate, theimaging array including imaging pixels, each pixel including at leastone readout element and one photosensor; a scintillator to convert firstradiographic radiation of one or multiple wavelengths range to seconddifferent photoelectric radiation of one or multiple wavelengths rangeproximate to the imaging array; and a first dielectric layer formedbetween the scintillator and the imaging array, wherein the dielectricconstant of the first dielectric layer is less than 3.0.

In accordance with one embodiment, there can be provided a method ofmanufacturing a radiographic detector imaging apparatus that can includeforming an insulating substrate; forming an imaging array formed over asubstrate, the imaging array including imaging pixels, each pixelincluding at least one readout element and one photosensor, where thephotosensor is a polycrystalline photosensor or an amorphousphotosensor; forming a scintillator to convert first radiographicradiation of one or multiple wavelengths range to second differentphotoelectric radiation of one or multiple wavelengths range proximateto the imaging array; and forming a first insulating layer comprisingorganic material between the scintillator and the imaging array, where adielectric constant of the first insulating layer is less than 3.3.

In accordance with one embodiment, there can be provided a projectionradiographic imaging apparatus that can include a scintillator; animaging array formed over a substrate, the imaging array includingimaging pixels, each imaging pixel including at least one readoutelement and one photosensor, where the photosensor is a polycrystallinephotosensor or an amorphous photosensor; and a first insulating layerand a second insulating layer formed between the scintillator and theimaging array, where a dielectric constant of the second insulatinglayer over at least some not photosensitive portions of the imagingarray is less than 3.3.

Such aspects are given only by way of illustrative example, and suchaspects may be exemplary of one or more embodiments of the invention.Other desirable objectives and advantages inherently achieved by thedisclosed invention may occur or become apparent to those skilled in theart. The invention is defined by the appended claims.

BRIEF DESCRIPTION OF THE DRAWINGS

Various features of the embodiments can be more fully appreciated as thesame become better understood with reference to the following detaileddescription of the embodiments when considered in connection with theaccompanying figures, in which:

FIG. 1 is a diagram that shows a cross-section of an embodiment of aradiographic detector configured to include a combined scintillator andimaging array according to the application;

FIG. 2 is a diagram that shows a cross-section of another embodiment ofa combined radiographic scintillator and imaging array according to theapplication;

FIG. 3 is a diagram that shows a cross-section of another embodiment ofa combined scintillator and imaging array according to the application;

FIG. 4 is a diagram that shows a cross-section of another embodiment ofa combined scintillator and imaging array according to the application;

FIG. 5 is a diagram that shows a cross-section of an embodiment of aradiographic detector configured to include a combined scintillator andimaging array according to the application;

FIG. 6 is a diagram that shows a cross-section of an embodiment of aradiographic detector configured to include a combined scintillator andimaging array according to the application;

FIG. 7 is a diagram that shows a schematic of a portion of an imagingarray for a radiographic detector capable of using embodiments of lowdielectric constant insulating layer between a scintillator and imagingarray according to the application.

FIG. 8 is a diagram that shows a schematic of a portion of an imagingarray for a radiographic detector capable of using embodiments of lowdielectric constant insulating layer between a scintillator and animaging array including active pixels according to the application.

FIG. 9 is a diagram that shows a top view of an embodiment of aradiographic detector imaging array that is configured to include ascintillator and is capable of using embodiments of low dielectricconstant material therebetween as described herein.

FIG. 10 is a diagram that shows cross-sections of the imaging array asshown in FIG. 9 along lines A-A′ and B-B′.

FIG. 11 is a diagram that shows a top view of conductive layers in anembodiment of a radiographic detector imaging array.

FIG. 12A is a diagram that shows a cross-section of a related artradiographic detector configured to include a combined scintillator andimaging array;

FIG. 12B is a diagram that shows a cross-section of another related artradiographic detector configured to include a combined scintillator andimaging array;

FIG. 13 is a diagram that shows a cross-section of a pixel of a digitalradiographic (DR) array including an embodiment of an anti-static layer.

FIG. 14 is a diagram that shows a cross-section of another embodiment ofa combined scintillator and radiographic imaging array;

FIG. 15 is a diagram that shows a cross-section of another embodiment ofa radiographic detector configured to include an imaging array with anelectrically coupled anti-static layer thereover;

FIG. 16 is a diagram that shows a cross-section of another embodiment ofa radiographic detector configured to include an imaging array with anelectrically coupled anti-static layer thereover;

FIG. 17 is a diagram that shows a cross-section of another embodiment ofa radiographic detector configured to include an imaging array with anelectrically coupled anti-static layer thereover;

FIG. 18 is a diagram that shows a cross-section of another embodiment ofa radiographic detector configured to include an imaging array with anelectrically coupled anti-static layer thereover;

FIGS. 19-20 are diagrams that show cross-sections of additionalembodiments of a radiographic detector configured to include a combinedscintillator and imaging array with an anti-static layer therebetweenthat can be coupled to a reference voltage.

FIG. 21 is a diagram that shows a cross-section of a radiographicdetector configured to include an imaging array with a patternedanti-static layer embodiment thereover.

FIGS. 22-24 are diagrams that show a top-down view of a layout foradditional exemplary embodiments of a radiographic detector configuredto include an imaging array with a patterned anti-static layerthereover.

FIG. 25 is a diagram that shows a cross-section of another embodiment ofa radiographic detector configured to include an imaging array with apatterned anti-static layer thereover.

FIG. 26 is a diagram that shows a top-down view of a layout for apatterned anti-static coating shown in FIG. 25.

FIG. 27 is a diagram that shows a cross-section of another embodiment ofa radiographic detector configured to include an imaging array with apatterned anti-static layer thereover;

FIG. 28 is a diagram that shows a top-down view of a layout for apatterned anti-static coating shown in FIG. 27.

FIGS. 29A-29B are a diagram that shows a top-down view of a layout for apatterned anti-static coating where FIG. 29A is a photo-micrograph of apixel without TFT light shield and FIG. 29B is a photo-micrograph of thepixel with an overlay of anti-static coating containing colorantmaterial.

DESCRIPTION OF EXEMPLARY EMBODIMENTS

Reference will now be made in detail to nonlimiting exemplaryembodiments of the invention, examples of which can be illustrated inthe accompanying drawings. Wherever possible, the same reference numberswill be used throughout the drawings to refer to the same or like parts.In the following description, reference is made to the accompanyingdrawings that form a part thereof, and in which is shown by way ofillustration specific exemplary embodiments by which the invention maybe practiced. These embodiments are described in sufficient detail toenable those skilled in the art to practice the invention and it is tobe understood that other embodiments may be utilized and that changesmay be made without departing from the scope of the invention. Thefollowing description is, therefore, merely exemplary.

For simplicity and illustrative purposes, exemplary principles of theinvention are described by referring mainly to exemplary embodimentsherein. Moreover, in the following detailed description, references aremade to the accompanying FIGS. 1-11 and 13-29B, which illustratespecific embodiments. Electrical, mechanical, logical and structuralchanges can be made to the embodiments without departing from the spiritand scope of the present invention. Descriptions herein are, therefore,not to be taken in a limiting sense and the scope of the application isdefined by the appended claims and their equivalents.

Certain embodiments according to the application include radiographicdetector arrays including at least one insulator (e.g., a firstinsulating layer) between a scintillator and an imaging array (e.g.,photosensor) where a dielectric constant of the insulator is low. Forexample, embodiments of an insulating layer can include a dielectricconstant less than 3.3, less than 3.0, less than 2.6, less than 2.4,etc. Embodiments of radiographic detector arrays can further include asecond insulator (e.g., second insulating layer or a second lowdielectric constant layer) formed over at least a portion (e.g., thenon-photosensitive regions) of the imaging array. For example,embodiments of a second low dielectric constant insulating layer can besubstantially opaque (e.g., to visible light or wavelengths between 450nm and 650 nm). Embodiments of radiographic detector arrays can furtherinclude a third layer that can be electrically conductive over at leasta portion of a second insulator and the first insulator. In oneembodiment, only a low dielectric constant insulating layer overnon-photosensitive regions of the imaging array can be used.

Exemplary embodiments according to the application are shown in FIGS. 1through 11 and 13 through 29B.

FIG. 1 is a diagram that shows a cross-section of an embodiment of aradiographic detector configured to include a combined scintillator andimaging array using a low dielectric constant material in between. Asshown in FIG. 1, a detector array can include a low dielectric constantencapsulation (e.g., single layer) of an imaging array and ascintillator attached thereto.

In FIG. 1, an imaging array 170 can include an array of pixels 100. Asshown, pixels 100 can include known photosensing elements 140 (e.g.,photosensors, n-i-p photodiodes, p-n junction photodiodes, MISphotosensors, phototransistors, etc.), known switching elements 150(e.g., MOS thin-film-transistors, junction field-effect-transistors,fully-depleted SOI transistors, partially-depleted SOI transistors,Silicon-on-glass transistors, bulk MOS transistors, bi-polartransistors, etc.), or read-out circuits (not shown), etc. Thephotosensing elements 140 and the switching elements 150 can besubstantially co-planar. The imaging array 170 can optionally include apassivation layer 132 (e.g., thin encapsulation layer) for protectionand/or isolation of the imaging array 170. In the related art, a siliconnitride layer or a silicon dioxide layer, which have a high dielectricconstant, can be used as the passivation layer 132, however, suchpassivation layers are thin, typically less than 500 nm, and difficultto make thicker. An active surface of imaging array 170 can include, forexample, topography between the highest and lowest point of about 1 μmto about 3 μm.

Also shown in FIG. 1 is low dielectric constant insulating layer 160that can be formed over (e.g., encapsulate) the active surface of theimaging array 170 to provide a selected separation or fixed separationof the imaging array 170 from the scintillator 180. For example, theheight of a low dielectric constant insulating layer 160 can be higherthan the active surface of imaging array 170. Imaging array 170 can beformed on an insulating substrate such as a glass substrate 130. Alsoshown in FIG. 1 is scintillating screen 182 that can include a substrate184 (referred to herein as scintillator 180). Scintillator 180 can beplaced over the low dielectric constant insulating layer 160 and theimaging array 170 to form an integrated digital radiography detector190. As used herein, the active surface of imaging array 170 is intendedto include the surface of the imaging array 170 that faces thescintillator 180 and comprises pixels 100.

Active areas of the active surface of the imaging array 170 can includeareas used for photosensing and remaining portions of the active surfacecan preferably provide potential locations for low dielectric constantsecond insulating layers. In exemplary embodiments, one or morelow-dielectric constant insulator(s) can be coated on a radiographicarray and patterned such that the thickness of the low-dielectricconstant insulator over the photosensor (e.g., photodiode) is less thanthe thickness of the low-dielectric constant insulator over thenon-photo-sensitive portions of a radiographic imaging array. However,as shown in FIG. 1, in one embodiment, the low dielectric constantinsulating layer 160 can be a single insulating layer that canencapsulate the imaging array 170.

A scintillator 180 can be applied in close proximity of the imagingarray 170 in order to convert X-rays into visible light. The distancebetween scintillator and imaging array is generally made as small aspossible to improve detector array characteristics (e.g., reduce opticalcrosstalk between adjacent pixels). In some portable radiographicdetectors, the scintillator may be deposited directly on the imagingarray. Inventors of this application determined an interaction between ascintillator and data lines on a radiographic detector when thescintillator (e.g., deposited CsI scintillator) was in close proximityto the data lines. The CsI scintillator has high dielectric constant(e.g., 6.5) and can have ionic charge and finite resistivity.

Data lines 174 can be the largest source of noise in a DR detector, forexample, where noise in electrons proportional to the data linecapacitance times the square root of the data line resistance. Onecomponent of data line capacitance is an overlap capacitance betweendata lines 174 and gate lines 172. Two contributors to data linecapacitance can be the overlap area between data lines 174 and gatelines 172 and the drain 151-to-gate 172 and source 152-to-lightshield153 capacitance. In addition to these two components, a thirdcontributor, which can be smaller, to the data line capacitance can becapacitance between bias lines 176 and data lines 174. Since the biasline 176 can be coupled to an anode 162 of photosensors or pinphotodiode 161, an entire area of the anodes of all photosensors orphotodiodes in a given column and adjacent columns can contribute to thecapacitance between bias lines 176 and data lines 174.

Most scintillating materials have high dielectric constant. CsI, forexample, can have a dielectric constant of 6.5. Gd₂O₂S (GOS) particlescoated with a binder can have a dielectric constant of about 4.8 Theinventors of the application determined that the presence of thescintillator can significantly increase the capacitive coupling betweenbias line 176 and data line 174.

To reduce such capacitive coupling, a separation between scintillatorand at least portions of an imaging array can be increased using aninsulator. The lower the dielectric constant of the insulator, thegreater the reduction in capacitance can be for a given thicknessinsulator. In contrast, since the optical crosstalk between pixels inthe imaging array depends only on the insulator thickness, thecapacitive coupling can be reduced or minimized for a given opticalcrosstalk by selecting a low dielectric constant insulator.

Conventional dielectrics used in flat panel processing, such as siliconnitride, have high dielectric constants. For example, silicon nitridehas a dielectric constant of 7.5 and silicon dioxide can have adielectric constant of 3.9.

According to embodiments of the application, embodiments of aninsulating layer 160 with a dielectric constant less than 3.0, caninclude selective organic dielectrics. Exemplary embodiments of lowdielectric constant insulating layer 160 can include high transparencyto light emitted by the scintillator and an index of refractioncorresponding to the imaging array/scintillator. For example, B-stagedbisbenzocyclobutene-based (BCB) monomers can have a dielectric constantof 2.5-2.65, high transparency in the visible range and/or an index ofrefraction of 1.6, or acrylic can have a dielectric constant of 3.3,high transparency in the visible range, and/or an index of refraction of1.49. Alternatively, porous inorganic dielectrics with low dielectricconstants can be used. Another material with a low dielectric constantthat can be used is SU8. In one embodiment, dielectric constants of afirst dielectric layer or a second dielectric layer can be less than2.8, less than 2.6, less than 2.4, or less than 2.0.

FIG. 2 is a diagram that shows another embodiment of a DR imaging arrayaccording to the application. As shown in FIG. 2, a dual-layerdielectric (e.g., first and second low dielectric constant insulatinglayers) or a selectively thinned single-layer dielectric can be used. Asshown in FIG. 2, a first dielectric or first low dielectric constantinsulating layer 160 can be over the photo-sensor to achieve highoptical coupling and low cross-talk and both the first dielectric andthe second dielectric 205 can over the non-photo-sensitive portion ofthe array to reduce capacitive coupling. Alternatively, a singledielectric 230 (not shown) can be made thinner 230′ over thephoto-sensor to achieve high optical coupling and low cross-talk and thesingle dielectric 230 can be thicker 230″ over a non-photo-sensitiveportion of the imaging array 170 to reduce capacitive coupling.Alternatively, the first dielectric 160 can be thin and over thephoto-sensor and the second dielectric 205 can be thicker and over thenon-photo-sensitive portions of the imaging array 175. In oneembodiment, the scintillator 180 preferably can be directly deposited onthe first and second low dielectric constant insulating layers (e.g.,160 and 205 or 230, such as by evaporation for CsI or by coating forGOS).

In one embodiment, second low dielectric constant insulating layers 205can be wider/larger at a lower surface (horizontal cross-section) orbottom surface than at an upper surface or top surface. The seconddielectric 205 can have a sloped transition 207 from a top surface tolower surface, which can improve attachment of the scintillator to theimaging array. The transition 207 can be linear or non-linear. Forexample, second dielectric 205 having tapered sides can improveperformance characteristics and/or simplify manufacturing processes.

In one model used to analyze an exemplary imaging array for aradiographic detector, a low dielectric constant layer reduced acapacitive interaction for a scintillator and an imaging array.Exemplary interactions are shown below. Table 1 shows the dielectricconstant for four different encapsulation materials; the datalinecapacitance per pixel for an array with no encapsulant material and aCsI scintillator; the dataline capacitance per pixel for an array with 2μm of the encapsulant material and the CsI scintillator; the datalinecapacitance per pixel for the same array with an additional 20 μm of BCBpatterned over the 2 μm encapsulant material. Table 1 shows that asdielectric constant of material drops the data line capacitance perpixel can be reduced.

TABLE 1 Encapsulant SiN PolyCarbonate Acrylic BCB Dielectric Constant 74 3.3 2.6 No Encapsulant 31.5 31.5 31.5 31.5 2 um Encapsulant 32.8 29.628.7 27.8 Plus 20 um Patterned 30.5 27.7 27.1 26.3 BCB

Table 2 shows the dataline capacitance per pixel for threeconfigurations, (a) no encapsulation between a CsI scintillator and anarray, (b) a 20 μm acrylic encapsulation between the CsI scintillatorand the array, and (c) a 2 μm acrylic encapsulation with an additional20 μm of BCB patterned to cover the data line between the CsIscintillator and the array. Table 2 shows that by adding low dielectricconstant material over the data line, the capacitance can be furtherreduced without significant impact to QE.

TABLE 2 Data Line Pixel QE Capacitance Per (CsI Pixel (fF/pix)Scinitllator) (a) No Encapsulation 31.5 51.3 (b) 20 um Acyrlic 27.3 50.2(c) 2 um Acrylic + 27.1 50.2 20 um BCB

FIG. 3 is a diagram that shows another embodiment of a DR imaging arrayaccording to the application. As shown in FIG. 3, second low dielectricconstant insulating layer 305 can be opaque to visible light. Forexample, the second dielectric layer 305 can be an opaque organicdielectric layer. As shown in FIG. 3, first low dielectric constantinsulating layer 310 can be over the photo-sensor to achieve highoptical coupling and low cross-talk and both the first dielectric 310and the second dielectric 305 can be over the non-photo-sensitiveportion of the array to block impinging light and/or reduce capacitivecoupling.

Opacity or a light-blocking condition for the second low dielectricconstant insulating layers 305 can be achieved in a number of exemplaryways, including but not limited to: incorporation of pigment in thesecond low dielectric constant insulating layers 305 prior to coatingand patterning, incorporation of dye in the second low dielectricconstant insulating layers 305 prior to coating and patterning, use ofphoto-active or thermally-active materials in the second low dielectricconstant insulating layers 305 that become opaque upon exposure to lightor heat, and/or dye diffusion into the second low dielectric constantinsulating layers 305 following coating and patterning (e.g., similar tocolor filters on image sensors). Alternatively, the second lowdielectric constant insulating layers 305 can contain mordants that binda dye and the first low dielectric constant insulating layers 310 cancontain a dye-blocking layer.

Opaque as used herein can include materials that absorb light or reflectlight. Absorbing opaque materials can have an exemplary absorption ofequal to or greater than about 60%, 80%, or 90% in an exemplary 1-10micron thickness of the second dielectric layer 305. Colorants, as usedherein can include, dyes, pigments, etc., that can be incorporated intoexemplary embodiments of low dielectric constant insulating layers(e.g., the second dielectric layer 305) not over the photosensor areasof imaging array 175 to increase opacity or reduce an amount ofscintillator light there through. For example, the second dielectriclayer 305 can include opaque materials or at least one surface ofthereof can include opaque materials. For example, dye or pigment may bediffused into or transferred onto the surfaces (e.g., side surfaces or atop surface) of the second dielectric layer 305, such as by techniquesused to form color filter arrays for displays. Absorbing materials(e.g., colorants, etc.) for the second dielectric layer 305 can be usedto reduce optical crosstalk caused by light piping between the imagingarray 175 and the scintillator 180.

FIG. 4 is a diagram that shows another embodiment of a DR imaging arrayaccording to the application. As shown in FIG. 4, light-blockingdielectric layer can be patterned to block the scintillator 182 lightfrom impinging the TFT 150. Various related art TFTs 150 can belight-sensitive and/or can suffer long-term degradation of performancecharacteristics under prolonged exposure to light. To reduce or preventsuch deleterious effects form light, a light shield 350 can be arrangedbetween the TFT 140 and the scintillator 182. Exemplary light shieldscan be implemented in related art DR imaging array metal layers. Ametallic light shield, however, can increase the data line capacitance,and can thereby increase sensor noise. A substantially opaque lowdielectric constant insulating layer can be added to or replace thelight-shield, which can thereby reduce data line capacitance, and/orreduce imaging array 175 noise.

An embodiment of a combined scintillator and imaging array can use anopaque low dielectric constant layer 405 and can include a pixelconfiguration that does not include a metallic light shield. As shown inFIG. 4, the second light-blocking dielectric 405 can optionally extendover an edge of a PIN photodiode to reduce image lag that can be causedby interface states at the PIN photodiode edge. The secondlight-blocking dielectric 405 can also extend over areas whereillumination (e.g., light) from the scintillator 182 is not absorbed orreflected by the imaging array 175. Exemplary embodiments of a secondlight-blocking dielectric 405 can use colorant therein to reduce lighttransmission into imaging array 175 or the substrate 130, withconsequent light scattering to adjacent photosites and/or loss ofresolution.

FIG. 5 is a diagram that shows a cross-section of an embodiment of aradiographic detector configured to include a combined scintillator andimaging array using a low dielectric constant material in between. Asshown in FIG. 5, a third layer 515 can be formed or placed above/betweenas first low dielectric constant insulating layer 510 and a second lowdielectric constant insulating layer 505. The low dielectric constantinsulating layers 510 and 505 can be the same or different material. Thethird layer 515 can be conductive (e.g., an electrostatic shield),partially conductive, and/or insulating but opaque. An opaque layer forthe third layer 515 can provide light shielding of the pixel readoutcircuitry. A conducting layer for the third layer 515 can provideelectrostatic shielding of the pixel readout circuitry. In oneembodiment, the third layer 515 (e.g., conductive) can be on top of orover the second low dielectric constant insulating layer 505.

FIG. 6 is a diagram that shows a cross-section of an embodiment of aradiographic detector configured to include a scintillator and imagingarray using a low dielectric constant material in between. In one, some,or all exemplary embodiments, an anti-static layer can be includedbetween the scintillator and the imaging array. For example, ananti-static layer can be positioned between the array layers and thescintillator (e.g., coated on the array after fabrication andpatterned). As shown in FIG. 6, an anti-static layer 640 can reduce orprevent ESD damage to the imaging array 175 from static generated duringattachment of the scintillator 180, coating of the scintillator 180, orduring use caused by, for example, tribo-electric charging betweenscintillator and an insulator. Since the anti-static layer 640 can alsoincrease capacitance between dataline and bias line, embodiments of alow dielectric constant insulators can help to reduce or minimize thecapacitance for a given thickness insulator.

In one embodiment, GOS scintillator sheets can be attached to theimaging array using an adhesive. For example, an adhesive thickness canbe 5 to 10 microns. Alternatively, the adhesive can be roughlyequivalent in thickness to the low dielectric constant encapsulation orthicker than the low dielectric constant encapsulation. Further, theadhesive can be coated on the scintillator. In one embodiment, anantistat can be coated on the scintillator before the adhesive is coatedon the scintillator. In some embodiments, a surface of the lowdielectric encapsulation can be coated with an anti-stat and/or includeanti-stat material in the formulation of the adhesive. In anotherembodiment, the GOS scintillator can be coated directly on the imagingarray, which can be preferable to address large height differences inthe low dielectric encapsulation (e.g., first dielectric and seconddielectric).

In certain exemplary embodiments, the dielectric properties of theadhesive can also be considered (e.g., alone or in combination withother layers used to attach the scintillator to the imaging array). Inone embodiment, the dielectric properties of the adhesive layer and incombination with dielectric properties of the low dielectric constantencapsulation can be used to achieve a selected property or prescribeddielectric requirement of the encapsulation of the imaging array 170.For example, a dielectric property of the low dielectric encapsulationor a combined dielectric property of the adhesive and the low dielectricencapsulation can be to limit an increase in capacitance or in data linecapacitance caused by the scintillator to be no more than a 5%, 10%, or20% increase in capacitance caused by the data line and thescintillator.

In exemplary embodiments, additional features of couplings betweenscintillator/imaging array of a detector can be used. For example, Table3 provides exemplary combinations for features used with/for insulatinglayers of exemplary embodiments of methods and/or apparatus herein.

TABLE 3 Data line Photosensor or photodiode Dielectric constant Low NotApplicable (N/A) Refractive index N/A High Thickness Thick ThinTransparency NA or opaque High Antistat layer No Yes

In some embodiments, length and width (or height) of low dielectricconstant insulators or insulating layers can be limited by processes(e.g., minimum feature size, critical dimensions) used to define theinsulators. For photo-lithographical manufactuiring, typical flat-panelprocess capability would require a minimum length and width ofapproximately 3 microns.

Selected thickness or maximum thickness of exemplary low dielectricconstant layers can be determined by the loss in resolution caused bylateral scattering of light (e.g., light-piping) between the activesurface of the imaging array and the opposing surface of thescintillator. Thicknesses for exemplary embodiments of low dielectricconstant layers can be 10 microns or less for 150 micron pixeldimension. In exemplary embodiments of low dielectric constant layers,thickness can be 15 microns or less, 5 microns or less, 3 microns orless, or 1 micron or less.

According to exemplary embodiments, an adhesive layer (not shown) can beadded to a surface of embodiments of low dielectric constant insulatinglayers to form a bond to the surface of the scintillator layer 180facing the imaging array 170, 175. Alternatively or in addition, apassivation layer (not shown) can be included on the active surface ofthe imaging array 170, 175, and embodiments of low dielectric constantinsulating layers can be formed (e.g., over) the passivation layer (notshown).

Embodiments of radiographic detector arrays 190 can reduce problemscaused by noise generated by interactions between the scintillator 180and/or elements in the imaging array 170, 175. By reducing noise causedby the scintillator 180 in relation to the imaging array 170, 175,embodiments of radiographic digital detector arrays 190 can includeimproved imaging characteristics.

Lateral scattering of light caused by reflections off the active surfaceof the imaging array and the scintillator can result in loss ofresolution can be improved by using the opaque second low dielectricimaging layers. While reducing or preventing crosstalk, the opaquesecond low dielectric imaging layers also can reduce the signal levelbecause of the optical absorption of the light emitted from thescintillator 180. It will be appreciated that incorporation of colorantsin photo-patternable materials can block the UV wavelengths used forphotolithography and therefore the colorants that are substantiallytransparent to UV but opaque in the visible spectrum can be used.Alternatively, an opaque material may be patterned using photoresist andthe pattern in the photoresist transferred to the spacer material bysubsequent wet etching or dry etching of the underlying spacer material.

Embodiments of detector arrays 190 including first and/or second lowdielectric imaging layers can be manufactured in many ways, theembodiments discussed herein are various example methods (e.g.,photo-patternable or etching, for example, ion beam milling, reactiveion etching), but are not intended to be limiting. It will beappreciated that photolithography techniques, anisotropic etchingtechniques, isotropic etching techniques, various deposition techniques,etc. are well known in the art and the techniques can be adjusted asrequired to obtain desired results herein. Further, detector arrays andthe methods of manufacturing detector arrays are generally known.

As will be obvious to one of ordinary skill in the art, the variousembodiments can be combined to form many different combinations, all ofwhich are intended to be incorporated by this disclosure. In oneembodiment, exemplary scintillator 180 and/or imaging array 170, 175 canbe coated with additional optional layers (e.g., a protective layer). Aswill be obvious to one of ordinary skill in the art, the variousembodiments can be combined to form many different combinations, all ofwhich are intended to be incorporated by this disclosure.

FIG. 7 is a diagram that shows a schematic of a portion of an imagingarray for a radiographic detector capable of including embodiments of alow dielectric insulating layer described herein. FIG. 7 is also adiagram that shows a schematic of a portion of an imaging array for aradiographic detector capable of including embodiments of an anti-staticlayer according to embodiments herein. In certain exemplary embodiments,an imaging array for a radiographic detector can include combinations ofembodiments of anti-static layers (e.g., patterned) and/or embodimentsof low dielectric insulating layers. As shown in FIG. 7, a schematic ofa portion of an exemplary flat panel imager 740 can include an array 712with a number of pixels such as pixels 722 including a-Si:H n-i-pphotodiodes 770 and TFTs 771. Gate driver chips 728 can connect to theblocks of gate lines 783, readout chips 730 can connect to blocks ofdata lines 784, and bias lines 785 can connect to a bias bus 732 orvariable bias reference voltage. Charge amplifiers 786 can be providedthat receive signals from the data lines 784. An output from the chargeamplifiers 786 can go to an analog multiplexer 787 or directly to ananalog-to-digital converter (ADC) 788 to stream out the digital imagedata at desired rates.

In another embodiment, the imaging array can comprise active pixels, inwhich an amplifier is provided for converting the voltage on thephotosensor to a current. Several designs for active pixel are wellknown to those skilled in the art, including 3-transistor, 4-transistorand shared-transistor designs. An exemplary 3-transistor design isillustrated in FIG. 8. A pixel can include a photodiode 102, a biassupply line 101, an amplifier TFT 107, and a row select TFT 108addressed by the row select line 110, a reset TFT 103 addressed by thereset select line 104 as shown in FIG. 8. Biases Vamp 106 and Vreset 105can be supplied external to the pixel. In operation, the cathode of thephotodiode 102 can be reset to a voltage Vreset by enabling the resetselect line 104, thereby turning the reset TFT 103 into a conductingstate. Following reset, the imaging array is exposed to light. Theexposure causes the potential between the anode and the cathode of thephotodiode to decrease, thereby causing the voltage on the gate of theamplifier TFT 107 to change. Following exposure, the signal can be readout by enabling the row select line 110, connecting the amplifier TFT107 to the data line 109 and causing a current to flow from theamplifier bias Vamp 106 to the dataline 109. This current may be sensedin a number of ways. In one exemplary method, a reference current can besupplied to the dataline 109 by a reference current generator 116. Acurrent mirror circuit is commonly used for the current generation. Thevoltage Vout 117 on the dataline is sensed, often with a voltagesampling circuit internal or external to the array. Following signalsensing, the photodiode can be reset by enabling the reset TFT. Thesignal on the dataline can be sensed a second time, with the exposure ofthe photodiode determined by the difference between the signal on thedataline 109 before and after reset. In a second exemplary method, thecurrent is integrated by a charge amplifier external or internal to theimaging array.

One limitation to readout speed in active pixel imaging arrays realizedin radiographic detectors or flat-panel TFT technology is the rise timeof the signal on the dataline 109. Referring to the readout method ofFIG. 8, the rise time of the signal on the dataline increases inproportion to the dataline capacitance. Using a low dielectric constantorganic material, such as BCB, between the array and the scintillatorcan enable increased readout speed active pixel radiographic detectors.

One limitation to readout speed in active pixel imaging arrays realizedin flat-panel TFT technology is the rise time of the signal on thedataline 109. Referring to readout of imaging array of FIG. 8, the risetime of the signal on the dataline increases in proportion to thedataline capacitance. Using a patterned anti-static material over theimaging array or between the imaging array and the scintillator canallow readout speeds to be comparable to active pixel radiographicdetectors lacking the patterned anti-static material.

FIG. 9 is a diagram that shows a top view of an embodiment of aradiographic detector imaging array that is configured to include ascintillator (not shown) and is capable of using embodiments of anintermediate layer such as low dielectric constant material therebetweenas described herein. FIG. 10 is a diagram that shows cross-sections ofthe imaging array as shown in FIG. 9 along lines A-A′ and B-B′.

FIG. 11 is a diagram that shows a top view of conductive layers in anembodiment of a radiographic detector imaging array that can include ascintillator (not shown) and is capable of using embodiments of anintermediate layer such as low dielectric constant material therebetweenas described herein. As shown in FIG. 11, a first conductive/metal layer1105 can include a gate line, a second conductive/metal layer 1110 caninclude a source and drain for TFT transistor, a third conductive/metallayer 1115 can include a lower electrode for a photosensor, a fourthconductive/metal layer 1120 can include an upper electrode for aphotosensor, and a fifth conductive/metal layer 1125 can include a biasline and data line. Pixel capacitance or imaging array capacitance canbe affected by interactions between such exemplary conductive/metallayers or such exemplary conductive/metal layers and a scintillator.

Radiographic imaging arrays are known to be sensitive to electrostaticcharge. Electrostatic charge can degrade the performance of radiographicarrays in a number of ways. First, for example, electrostatic chargeresident at or in proximity of the imaging array can change the leakagecharacteristics of thin-film transistors used in pixel addresscircuitry. Second, electrostatic charge resident at or in proximity ofthe photosensor can cause changes in the surface potential of thephoto-sensor sidewall, thereby increasing leakage current, increasingimage lag, and/or leading to low-frequency noise. Third, in more severecases, electrostatic charge can cause permanent damage to TFTs, therebycausing a short circuit or an open circuit between the photosensor andthe data line. Fourth, in more severe cases, electrostatic charge cancause permanent damage to the photodiodes, thereby causing a shortcircuit or an open circuit in the photodiode.

FIG. 12A is a diagram that shows a related-art pixel of an imaging arraywith mesa PIN photodiode 14 and TFT switch 15. As shown in FIG. 12A, ascintillator 18 is in direct contact with a top layer 32, typically athin inorganic layer such as silicon nitride, of an imaging array 17. Ascintillator 18 can be a scintillating sheet pressed against the imagingarray 17, such as a sheet of Gd2O2S scintillating material, or depositedon the imaging array 17, such as evaporated CsI.

FIG. 12B is a diagram that shows another related-art pixel of an imagingarray with mesa PIN photodiode 14 and TFT switch 15. As shown in FIG.12B, an organic encapsulation layer 40 is coated over the imaging array17 to provide physical and chemical protection of the imaging array 17from damage from a scintillator 18.

Related-art radiographic imaging arrays employ electro-static discharge(ESD) protection diodes on address lines (such as datalines and biaslines) and/or on readout lines to reduce voltage swing on these lines,thereby reducing ESD damage. However, related-art radiographic imagingarrays did not provide ESD protection internal to pixels in the imagingarray.

The electrostatic charge can have a variety of sources, including butnot limited to, first, tribo-electric charge generated by movement ofthe scintillator on the imaging array or movement of the scintillator onencapsulation over the imaging array. Second, charge can be generatedduring coating of the scintillator on the imaging array in arrays inwhich coated scintillators rather than attached scinitillators areemployed. Third, charge can be generated during cleaning or handlingimaging arrays, such as from water evaporation, water-spraying,air-spraying, or touching the imaging array with human or mechanicalmeans. Fourth, charge on the surface of the scintillator material (e.g.,scintillator sheets are insulating and can hold electrostatic charge forlong periods of time). Scintillator materials (e.g., deposited) cancontain fixed positive or negative charge.

There are a number of ways in which electrostatic charge can impactoperations of photosensors including but not limited to, first, positivecharge along the photodiode sidewall can cause an increase in electronflow along the sidewall, thereby increasing the leakage current. Second,positive charge can also increase the low-frequency (e.g., flicker)noise resulting from trapping and de-trapping of electrons at or nearthe sidewall.

Further, the charge level can be unstable, depending on exemplaryenvironmental conditions such as humidity or temperature. Such unstablecharge levels can result in instability in imaging array calibration or,in some cases, cause the imaging array to fail to meet performancespecifications for radiographic imaging.

Exemplary embodiments according to the application are shown in FIGS. 13through 20.

Certain exemplary embodiments of systems and/or methods herein includeradiographic detector arrays that can include a continuous anti-staticmaterial (e.g., a first anti-static layer) positioned over an imagingarray or between at least a portion of an imaging array (e.g.,photosensor) and a scintillating material. For example, embodiments of acontinuous anti-static material can between at least a portion of thearray and a scintillating material to reduce or prevent electrostaticcharge. Embodiments of radiographic detector arrays and methods canfurther include providing electrical contact to the anti-staticmaterial. In one embodiment, the electrical contact can be made withinpixels of the imaging array.

Anti-static materials can be defined as materials with resistivitybetween 1×10⁴ Ω/square and 1×10¹⁰ Ω/square. At resistivity <1×10⁴Ω/square, the material can be considered a conductor and at resistivity>1×10¹⁰ Ω/square, the material can be considered an insulator.

FIG. 13 is a diagram that shows a cross-section of a pixel of a digitalradiographic (DR) array including an embodiment of an anti-static layer.As shown in FIG. 13, a low dielectric constant insulator 160 can beformed over an imaging array 170 and an anti-static layer 120 can bepositioned on the side of the insulator 160 opposite the imaging array170. The anti-static layer 120 can reduce or dissipate any chargeresiding on the surface of the insulator 160 and/or can reduce orprevent additional charge from forming. Since this charge can reside onthe side of the insulating layer opposite the imaging array, theanti-static layer 120 can cause any surface charge to spread over theentire array rather than concentrating in at least one position. Whenhandled in standard clean room conditions, which include a de-ionizingspray, or when connected to a grounding line or when connected to theESD ground connection on the array, the surface charge over the imagingarray 170 or insulator 120 can be significantly reduced by theanti-static layer 120.

As shown in FIG. 13, the low dielectric constant insulator 120 is coatedover the imaging array 170 to provide physical and chemical protectionto the imaging array 170. The additional insulator 160 is not required,but can be preferred because of the added protection provided tosupplement the thin silicon nitride top-coat on the array.

FIG. 14 is a diagram that shows a cross-section of an embodiment of aradiographic detector configured to include a combined scintillator andimaging array using an anti-static layer in between. As shown in FIG.14, an anti-static layer can dissipate charge residing on a surface ofan imaging array (e.g., insulator) and/or can prevent or reduceadditional charge from forming thereon.

In shown in FIG. 14, an imaging array 170 can include an array of pixels100. As shown, pixels 100 can include known photosensing elements 140(e.g., photosensors, n-i-p photodiodes, p-n junction photodiodes, MISphotosensors, phototransistors, etc.), known switching elements 150(e.g., MOS thin-film-transistors, junction field-effect-transistors,fully-depleted SOI transistors, partially-depleted SOI transistors,silicon-on-glass transistors, bulk MOS transistors, bi-polartransistors, etc.), or read-out circuits (not shown), etc. Thephotosensing elements 140 and the switching elements 150 can besubstantially co-planar. The imaging array 170 can optionally include apassivation layer 132 (e.g., thin encapsulation layer) for protectionand/or isolation of the imaging array 170. In the related art, a siliconnitride layer or a silicon dioxide layer, which have a high dielectricconstant, can be used as the passivation layer 132, however, suchpassivation layers are thin and difficult to make thicker.

FIG. 14 shows an exemplary pixel of the imaging array 170 including athin-film photosensor (e.g., PIN photodiode) and a TFT switch. Alsoshown in FIG. 14 is an optional low dielectric constant insulator 160that can be formed (e.g., coated) over the imaging array 170 to providea selected separation or fixed separation of the imaging array 170 fromthe scintillator 180. For example, the height of the low dielectricconstant insulator 160 can be higher than the active surface of imagingarray 170. Imaging array 170 can be formed on an insulating substrate130 such as a glass substrate. Also shown in FIG. 14 is scintillatingscreen 182 that can include a substrate 184 (referred to herein asscintillator 180). The scintillator 180 can be a scintillating sheetpressed against the array, such as a sheet of Gd2O2S scintillatingmaterial, or deposited on the imaging array 170, such as evaporated CsI.The scintillator 180 can be placed over the low dielectric constantinsulator 160 and the imaging array 170 to form an integrated digitalradiography detector 190. Also shown in FIG. 14 are data lines 174, gatelines 172, metal lightshield 153 (e.g., for TFT switch 150), and biaslines 176. The bias line 176 can be coupled to an anode of photosensorsor photodiodes.

As used herein, the active surface of imaging array 170 is intended toinclude the surface of the imaging array 170 that faces the scintillator180 and comprises pixels 100. An active surface of imaging array 170 caninclude, for example, topography between the highest and lowest point ofabout 1 μm to over 3 μm.

The scintillator 180 can be applied in close proximity of the imagingarray 170 in order to convert X-rays into visible light. The distancebetween scintillator and imaging array is generally made as small aspossible to improve detector array characteristics (e.g., reduce opticalcrosstalk between adjacent pixels). However, the distance can be atradeoff between capacitive loading of the scintillator on the imagingarray and optical cross-talk.

Exemplary embodiments of anti-static layers (e.g., as shown in FIG. 14)can provide static protection between photodiodes and the scintillatorand/or between TFTs and the scintillator. In cases where thescintillator is brought into contact with the imaging array 170, staticcharge can exist on the surface of the scintillator (e.g., scintillatorsare highly insulating). Surface static charge has been found in practiceto have regions of surface electric field of both positive ornegative >>10 kV/cm. In addition, any motion of the scintillator 180against the imaging array 170 can generate charge due to tribo-electriccharging. Such exemplary charges can be spread or distributed by theanti-static layer 120. Further, when the anti-static layer 120 iselectrically connected either to a ground in the imaging array 170(e.g., ESD ground) or to the external electronics, the charge can bereduced or removed from the anti-static layer.

Exemplary anti-static layers 120 can be formed with a variety ofmaterials. Examples for materials for the anti-static layers 120 includebut are not limited to conductive polymers, such as Clevious™ materialssold by Heraeus Corporation and nano-structured materials in an organicbinder. Conductive polymers can include but are not limited to (a)sub-monolayer coverage for low conductivity or (b) thick coatings (e.g.,0.1 to 5 um) for higher conductivity, where the conductivity can dependon solids loading, material type and/or process conditions.Nano-structured materials in a binder (e.g., an organic binder) caninclude but are not limited to nano-rods that can have dimensions suchas 1-30 nm cross-section and lengths from microns to millimeters, silvernanowires, or carbon nanotubes.

Certain exemplary embodiments of anti-static layers can instantiatevarious preferred properties, individually or in combination, includingbut are not limited to thickness, resistivity, optical transmission,optical index of refraction, and/or dielectric constant.

A thickness of anti-static layer embodiments can be a trade-off betweenoptical cross-talk between pixels and required conductivity. A thicklayer (e.g., greater than 5 urn) can allow optical cross-talk, forexample when combined with additional transparent layers between theimaging array and the absorptive or scattering region of thescintillator. These additional transparent layers can include organicand inorganic dielectrics over the imaging array and clear coatinglayers over a scintillator sheet. However, as the anti-static layer isthinned, its conductivity can be diminished, resulting in reducedanti-static protection. For certain antistatic layer embodiments, alayer thickness of less than 5 um is desired and a layer thickness lessthan 2 um is preferred.

A resistivity of anti-static layer embodiments can be a trade-offbetween electrical effect on the imaging array and anti-staticprotection. A low resistivity (e.g., less than 1×10⁴ ohms per square)can add to the data-line capacitance, thereby increasing imager (e.g.,integrated digital radiography detector 190) noise, and to thephotodiode capacitance, thereby increasing the charge transfer timeconstant between photosensor (e.g., photodiode) and dataline. A highresistivity (e.g., greater than 1×10¹⁰ ohms per square) can result in along time constant for discharge of static electricity.

An optical transmission of anti-static layer embodiments is preferably ahigh optical transmission (e.g., greater than 90%, 95%) over the visiblespectrum (e.g., >90% over 400 nm to 700 nm wavelengths) for clinicallyacceptable or maximum quantum efficiency.

An optical index of refraction for anti-static layer embodiments can beintermediate between the scintillator and the silicon nitride top coatof the imaging array to reduce or minimize reflection losses at theanti-static layer. In exemplary embodiments where an organicencapsulation layer is disposed between the imaging array and theanti-static coating, matching the indices of each of the optical layersor an intermediate optical index of refraction is desired.

Certain exemplary embodiments of radiographic imaging arrays can furtherinclude provision of a reference voltage or ground connection foranti-static film/layer embodiments over a radiographic imaging rarity.As described herein, anti-static layer embodiments for radiographicarrays alone can cause charge to spread over the entire surface of theanti-static layer (e.g., imaging array), which is preferred to theconcentrations of positive and of negative charge that can form oninsulators and cause mura, or non-uniformity of parameters such as darkcurrent or image lag in the array. Further, exemplary embodiments canprovide a reference voltage or a ground connection to an anti-staticlayer can reduce or prevent uniform charge buildup on the anti-staticmaterial.

Various exemplary ground connection (e.g., reference voltage)embodiments for anti-static layers 120 include but are not limited to(a) provision of contact pads for the anti-stat coating on the imagingarray or (b) contacts can be provided within the imaging array (e.g.,internal to each pixel or in a sparse matrix within the imaging array).Exemplary ground connection (e.g., reference voltage) embodimentsprovision of contact pads for the anti-stat coating on the imaging arraycan include (i) electrical connection to a separate electrical lead tothe external electronics, (ii) electrical connection to the ESD groundtrace on the array, and/or (iii) electrical connection to one of thevoltage or bias connections on the imaging array 170, such as the biasfor the photodiode.

FIG. 15 is a diagram that shows a cross-section of an embodiment of aradiographic detector configured to include an imaging array with agrounded anti-static layer thereover. As shown in FIG. 15, a contact canbe provided around an imaging array perimeter for an anti-staticcoating. In one embodiment, contact pads 122 can be provided external tothe imaging portion of the imaging array 170 positioned at one ormultiple locations around the perimeter of the integrated digitalradiography detector 190 to reduce or minimize series resistance of agrounded anti-static layer 120′. An area of the contact pads 122 can bechosen sufficiently large that the contact series resistance contributesinsignificantly or minimally to the sheet resistance of the anti-staticlayer.

FIG. 16 is a diagram that shows a cross-section of another embodiment ofa radiographic detector configured to include an imaging array with ananti-static layer thereover that is coupled to a reference voltage. Asshown in FIG. 16, a contact can be provided internal to the pixel 100using the bias line 176 in the imaging array 170 through via 124 in theencapsulation layer 160 and top nitride layer 132. Preferably withoutadditional modification to the imaging array 170, the bias line 176 canbe connected to an external bias supply in the integrated digitalradiography detector 190 to provide a reference voltage (e.g., ground)to the anti-static layer 120″.

Additional alternate embodiments for electrical connection ofanti-static layers can use conductive traces in the radiographic imagingarray to provide a reference voltage (e.g., ground reference) to theanti-static layers. For example, electrical grounding for theanti-static layers 120, 120′, 120″ can use (a) separate metal traces foranti-static connection within the array and vias between these metaltraces and the anti-static layer and/or (b) provide a sparse matrix ofconnections to the anti-static layer in the imaging array positionedbetween a limited number of pixels (e.g., such as every 256 rows or 256columns, at selected prescribed locations, aperiodic, etc.).

Alternate embodiments for electrical connection of anti-static layerscan use physical contact(s) or electrical coupling provided through aconductive coating or an anti-static coating on the scintillator,preferably where the scintillator anti-static coating is attached orelectrically connected to a reference voltage or ground connection.

FIG. 17 is a diagram that shows a cross-section of another embodiment ofa radiographic detector configured to include a combined scintillatorand imaging array with an anti-static layer therebetween that is coupledto a reference voltage (e.g., ground). As shown in FIG. 17, a contactcan be provided through a cassette or housing of the digital detector,which is typically conductive. Preferably without additionalmodification to the imaging array 170, the anti-static layer 120 can beconnected (e.g., physically, electrically) to an anti-static layer 1720of the scintillator 180 that can be connected to a cassette 1725 of theradiographic detector that can be connected to provide a referencevoltage 1730 (e.g., ground) to the anti-static layer 120.

FIG. 18 is a diagram that shows a cross-section of another embodiment ofa radiographic detector configured to include a combined scintillatorand imaging array with an anti-static layer therebetween that is coupledto a reference voltage. As shown in FIG. 18, a contact can be providedthrough a metal or conductive contact to a surface of the scintillatordisposed closest to the imaging array 170. For example, the scintillator180 can be coated on at least the side proximate to the imaging array170 with an anti-static coating 1820, and within the housing of theradiographic detector, a conductor such as a conductive gasket 1825 canbe provided to allow electrical contact between a mounting plate 1830and the anti-static coating 120 using the anti-static coating 1820 onthe scintillator sheet.

FIGS. 19-20 are diagrams that show cross-sections of additionalembodiments of a radiographic detector configured to include a combinedscintillator and imaging array with an anti-static layer therebetweenthat can be coupled to a reference voltage. As shown in FIG. 19, narrowmetal or conductive traces 1920 can be patterned on the scintillatorsheet and can extend across a lower surface of the scintillator 180 andbe connected to the anti-static layer 120. As shown in FIG. 20,conductive traces 2020 can be patterned on the scintillator 180 aroundthe perimeter of the imaging area of the imaging array 170. Theanti-static layer 120 can be coupled or electrically connected throughthe conductive traces 1920 or the conductive traces 2020 (e.g., usingconductive gasket 1925) to a reference voltage such as but not limitedto mounting plate 1930. Exemplary embodiments of conductive traces caninclude high transparency to light emitted by the scintillator, opaqueand/or an index of refraction corresponding to the imagingarray/scintillator.

Embodiments of radiographic detector arrays 190 can reduce problemscaused by noise generated by interactions between the scintillator 180and elements in the imaging array 170. By reducing noise caused by thescintillator 180 in relation to the imaging array 170, embodiments ofradiographic digital detector arrays 190 can include improved imagingcharacteristics.

As will be obvious to one of ordinary skill in the art, the variousembodiments can be combined to form many different combinations, all ofwhich are intended to be incorporated by this disclosure. In oneembodiment, exemplary scintillator 180 and/or imaging array 170 can becoated with additional optional layers (e.g., a protective layer). Aswill be obvious to one of ordinary skill in the art, the variousembodiments can be combined to form many different combinations, all ofwhich are intended to be incorporated by this disclosure.

FIG. 14 is a diagram that shows a cross-section of an embodiment of aradiographic detector configured to include a combined scintillator andimaging array using a continuous anti-static layer in between. As shownin FIG. 14, an anti-static layer can dissipate charge residing on asurface of an imaging array (e.g., insulator) and/or can prevent orreduce additional charge from forming thereon.

FIG. 15 is a diagram that shows a cross-section of an embodiment of aradiographic detector configured to include an imaging array with acontinuous grounded anti-static layer thereover.

There are various disadvantages to the continuous anti-static layer suchas illustrated in FIG. 14 and FIG. 15. For example, variousdisadvantages include anti-static layers can capacitively couple to thedataline, which can result in an increase the dataline capacitance andan increase in imaging array noise. Further, the ant-static layer cancapacitively couple to the anode of the photosensor, thereby increasingthe time constant for charge transfer from the photosensor/photodiode tothe dataline (τ=R_(TFT)C_(PD) where τ is the time constant, R_(TFT) isthe TFT on-resistance and C_(PD) is the diode capacitance).

In addition, there are several short-comings of existing arrays that canbe addressed or remedied by anti-static layers containing colorant. Forexample, a conductive or metal light-shield over the TFT, conventionallyincluded in related art radiographic imaging arrays, adds capacitance tothe imaging array including the dataline and/or the gateline. Asdescribed herein, this lightshield can be replaced with a patternedanti-static coating with colorant added. Further, there are areas of thepixel in which there are no light-blocking layers between thescintillator and the substrate. Light from the scintillator canpenetrate into the substrate in such areas to cause image flare and/orreduced resolution. An antistatic layer with colorant can reduce orprevent such light penetration.

Certain exemplary embodiments can provide a patterned anti-static layerfor use with a radiographic imaging array for a digital radiographicdetector. Several embodiments are described for the location of thepatterned anti-static coating at the pixel and array level. In addition,several additional embodiments are described in which colorant can beadded to the anti-static material to address or improve other arraycharacteristics.

FIG. 21 is a diagram that shows a cross-section of a radiographicdetector configured to include an imaging array with a patternedanti-static layer embodiment thereover. A large amount of surface chargecan cause permanent damage to photodiode 254. As shown in FIG. 21, apatterned anti-static layer 220 can be patterned to remain over thephotodiode 254, but not over datalines of the pixels 100. The photodiode254 can be the most static-sensitive component in the imaging array 170.A small amount of surface charge can act on the sidewall of a mesaphotodiode 254, to cause an increase in sidewall leakage, increasedimage lag caused by surface trapping of electrons or holes, and/or anincrease in low-frequency (e.g., flicker) noise in the photodiode 254.By patterning the anti-static layer 220 over the photodiode 254, thereis little or no increase in dataline capacitance because the anti-staticlayer 220 and the dataline are not proximate. Thus, the embodiment shownin FIG. 21 can implement a radiographic imaging array with theadvantages of static protection of the photodiodes without disadvantagesof increased dataline thermal noise. As shown in FIG. 21, the photodiode254 can include a transparent electrode contact (e.g., to p+ a-Si) 241,a p+ amorphous silicon (a-Si) layer 242, an intrinsic a-Si layer 243, an+ a-Si layer 244, and a metal electrode 245 (e.g., pixel electrodecontact to n+ a-Si.

There are various alternatives for embodiments of patterned anti-staticlayers as shown in FIG. 21. FIGS. 22-24 are diagrams that show exemplaryembodiments of a radiographic detector configured to include an imagingarray with a patterned anti-static layer thereover. As shown in FIG. 22,a first alternative layout for a patterned anti-static coating 320 doesnot overlie the dataline 376 and can be oriented continuously alongcolumns of the imaging array 170. The layout for the patternedanti-static layer 320 advantageously can greatly reduce capacitiveloading of the dataline 376 while still providing protection againststatic charge to the photodiodes 254. However, the resistance of theantistatic columns becomes quite high because of the number of squaresof sheet resistance. The number of squares of sheet resistance of acolumn can be equal to the number of pixels in the column, for example,greater than 1000. The large number of squares of sheet resistance canresult in a reduction in the ability of the anti-static coating todissipate charge rapidly. Further, the switching voltages applied to thegatelines during readout can couple capacitively to the anti-staticcoating 320, which can result in potential voltage transients in thevicinity of the switched dataline 376.

FIG. 23 is a diagram that shows a patterned anti-static coating 420embodiment including a second alternative layout that does not overliethe dataline 376 and can be oriented continuously along columns of theimaging array 170. As shown in FIG. 23, the anti-static coating 420 canbe patterned to reduce or minimize an overlap area 422 over the gatelines 372, which can reduce any capacitive coupling with the gate lines372, and therefore reduce any transient during gate-line clocking.However, a series resistance of the patterned anti-static coating 420 isincreased.

FIG. 24 is a diagram that shows a third alternative layout for apatterned anti-static coating 520 embodiment that can be orientedcontinuously along rows and columns of the imaging array 170. As shownin FIG. 24, the anti-static coating 520 can be patterned to reduce orminimize a crossover area 522 with both data line 376 and with gate line372. However, because the interconnection of the anti-static layer 520can be in the form of a grid, the net resistance from the perimetercontacts to the anti-static coating 520 and any pixel 100 in the imagingarray 170 can be substantially less than the embodiments of FIG. 22 orFIG. 23.

FIG. 25 is a diagram that shows a cross-section of another embodiment ofa radiographic detector configured to include an imaging array with apatterned anti-static layer thereover. FIG. 26 is a diagram that shows atop-down view of a layout for a patterned anti-static coating shown inFIG. 25. As shown in FIG. 25, contact to a patterned anti-stat layer 620embodiment on the imaging array 170 can be provided by a conductor orconductive anti-static coating 625 on the scintillator 180. Theconductivity from the patterned anti-static layers 620 on the imagingarray 170 can be electrically coupled the anti-static layer 625 on thescintillator 180, thereby providing a continuous sheet with lowresistance to any pixel 100 in the imaging array 170 in comparison withembodiments shown FIG. 22 to FIG. 24. As a result, no connecting regions(e.g., 422, 522) are required in the anti-static layer 620 of theimaging array 170 itself, and a layout can be provided in which theanti-static layer 620 is only over the photosensor.

FIG. 27 is a diagram that shows a cross-section of another embodiment ofa radiographic detector configured to include an imaging array with apatterned anti-static layer thereover. FIG. 28 is a diagram that shows atop-down view of a layout for a patterned anti-static coating embodimentshown in FIG. 27. As shown in FIG. 27, contact to a patterned anti-statlayer 820 embodiment on the imaging array 170 can be provided by aconductor or anti-static coating 825 on the scintillator 180. As shownin FIGS. 27-28, the patterned anti-stat layer 820 embodiment on theimaging array 170 can cover the perimeter of the photodiode. Advantagesfor patterned anti-stat layer 820 embodiment can include the following.The photodiode anode can be a transparent electrode contacting to a biasline, and therefore the photodiode anode can be protected from all butvery high static charge by the bias line ESD protection circuits. Thesidewalls of the photodiode, however, are not covered and can besensitive to static charge. Static charge in the proximity of thesidewall can cause increased leakage current, image lag and/orlow-frequency (e.g., flicker) pixel noise. Thus, the patterned anti-statlayer 820 embodiment over just the perimeter area not protected by thetransparent anode connection can allow increased light transmission tothe photodiode and reduced diode capacitance.

Additional embodiments can implement interconnection schemes for thepatterned anti-static layers of FIGS. 22-24. For such embodimentscontact to the anti-static layer for a reference voltage can be providedby pads on the array substrate located at the perimeter of the imagingarea and/or through the scintillator. For example in one embodiment, apatterned anti-static layer can be contacted by contact pads providedaround the perimeter of the imaging area, as illustrated in FIG. 14.

For certain exemplary embodiments of patterned anti-static layers, thepatterned anti-static layers can include a colorant material to block atleast a portion of the light incident on the imaging array. In oneembodiment, the anti-static layer 820 shown in FIG. 28 can contain acolorant material that can block at least a portion of the lightincident on the imaging array 170. The colorant material or colorant canbe spectrally selective, to block, for example, one or more spectralbands emitted from the scintillator 180 or blocking visible light towhich the photosensor 140 or photodiode is sensitive (e.g., typicallybetween 400 and 700 nm). Examples of colorant materials includepigments, dyes or particulate matter such as carbon particles or carbonfiber. Various advantages can be achieved by adding colorant to blocklight from the photodiode perimeter. Interface states at the amorphoussilicon-silicon nitride surface on the sidewall can cause trapping orexcessive trapping of photogenerated charge, which can result in imagelag. By blocking light from the sidewall, the image lag can be reducedwhile the quantum efficiency is only slightly reduced.

In another anti-static layer embodiment, the anti-static layer caninclude a colorant material and can extend over the readout circuitry inaddition to the photodiode perimeter. In related art radiographicimaging arrays, a metal light shield is provided over the back of theswitching TFT, for example as shown in FIG. 21. The light shield isrequired to reduce or prevent light absorption in the TFT (e.g., 150),which can cause an increase in leakage current and long-term TFTinstability. However, the light shield can add capacitance to the TFTand the dataline, which can result in increased thermal noise. As shownin FIG. 29B, a pixel has an overlay indicating a layout of theanti-static coating pattern 1020 extending over the readout circuit andthe same pixel without a metal lightshield is shown in FIG. 29A.

Additional alternate embodiments for electrical connection ofanti-static layers can use conductive traces in the radiographic imagingarray to provide a reference voltage (e.g., ground reference) to theanti-static layers. For example, electrical grounding for theanti-static layers 220, 320, 420, 520, 620, 820, 1020 can use (a)separate metal traces for anti-static connection within the array andvias between these metal traces and the anti-static layer and/or (b)provide a sparse matrix of connections to the anti-static layer in theimaging array positioned between a limited number of pixels (e.g., suchas every 256 rows or 256 columns, at selected prescribed locations,aperiodic, etc.).

Exemplary embodiments of conductive traces can include high transparencyto light emitted by the scintillator and an index of refractioncorresponding to the imaging array/scintillator.

Alternate embodiments for electrical connection of anti-static layerscan use physical contact(s) or electrical coupling provided through aconductive coating or an anti-static coating on the scintillator,preferably where the scintillator anti-static coating is attached orelectrically connected to a reference voltage or ground connection.

Notwithstanding that the numerical ranges and parameters setting forththe broad scope of the invention are approximations, the numericalvalues set forth in the specific examples are reported as precisely aspossible. Any numerical value, however, inherently contains certainerrors necessarily resulting from the standard deviation found in theirrespective testing measurements. Moreover, all ranges disclosed hereinare to be understood to encompass any and all sub-ranges subsumedtherein. For example, a range of “less than 10” can include any and allsub-ranges between (and including) the minimum value of zero and themaximum value of 10, that is, any and all sub-ranges having a minimumvalue equal to or greater than zero and a maximum value equal to or lessthan 10, e.g., 1 to 5. Furthermore, to the extent that the terms“including”, “includes”, “having”, “has”, “with”, or variants thereofare used in either the detailed description and the claims, such termsare intended to be inclusive in a manner similar to the term“comprising.” As used herein, the term “one or more of” or “and/or” withrespect to a listing of items such as, for example, “A and B” or “Aand/or B”, means A alone, B alone, or A and B.

Further, in the discussion and claims herein, the term “on” used withrespect to two materials, one “on” the other, means at least somecontact between the materials, while “over” means the materials are inproximity or near each other, but possibly with one or more additionalintervening materials such that contact is possible but not required.Neither “on” nor “over” implies any directionality as used herein. Theterm between as used herein with respect to two elements means that anelement C that is “between” elements A and B is spatially located in atleast one direction such that A is proximate to C and C is proximate toB or vice versa. The term “conformal” describes a coating material inwhich angles of the underlying material are preserved by the conformalmaterial.

In accordance with one embodiment, there can be provided a projectionradiographic imaging apparatus, that can include an insulatingsubstrate; a radiographic imaging array formed over the insulatingsubstrate, the radiographic imaging array comprising imaging pixels,each pixel including at least one readout element and one photosensor; ascintillator to convert first radiographic radiation of one or multiplewavelengths range to second different photoelectric radiation of one ormultiple wavelengths range proximate to the radiographic imaging array;and a continuous anti-static layer disposed between the radiographicimaging array and the scintillator.

In accordance with one embodiment, there can be provided a method ofmanufacturing a radiographic detector imaging apparatus that can includeforming an insulating substrate; forming a radiographic imaging arrayformed over a substrate, the imaging array including imaging pixels,each pixel comprising at least one readout element and one photosensor,where the photosensor is a polycrystalline photosensor or an amorphousphotosensor; forming a scintillator to convert first radiographicradiation of one or multiple wavelengths range to second differentphotoelectric radiation of one or multiple wavelengths range proximateto the imaging array; and forming a continuous anti-static layerdisposed between the radiographic imaging array and the scintillator.

In accordance with one embodiment, there can be provided a projectionradiographic imaging apparatus, that can include an insulatingsubstrate; a radiographic imaging array over the insulating substrate,the radiographic imaging array comprising imaging pixels, each pixelincluding at least one readout element and one photosensor; aninsulating layer over a portion of the imaging pixels; a scintillator toconvert first radiographic radiation of one or multiple wavelengthsrange to second different photoelectric radiation of one or multiplewavelengths range proximate to the radiographic imaging array; and ananti-static layer disposed between the insulating layer and thescintillator in which the anti-static layer is patterned in registrationto the portion of the imaging pixels.

In accordance with one embodiment, there can be provided a method ofmanufacturing a radiographic detector imaging apparatus that can includeforming an insulating substrate; forming a radiographic imaging arrayformed over the insulating substrate, the imaging array comprisingimaging pixels, each pixel including at least one readout element andone photosensor, where the photosensor is a polycrystalline photosensoror an amorphous photosensor; forming a scintillator to convert firstradiographic radiation of one or multiple wavelengths range to seconddifferent photoelectric radiation of one or multiple wavelengths rangeproximate to the imaging array; and forming a anti-static layer disposedbetween the radiographic imaging array and the scintillator, where theanti-static layer is patterned in registration to the imaging array.

In accordance with certain exemplary embodiments, the continuous orpatterned anti-static layer is an anti-static coating of an organicmaterial. In one embodiment, the continuous or patterned anti-staticlayer can be an anti-static coating comprising a nano-rods with anorganic binder. In one embodiment, the continuous or patternedanti-static layer is an anti-static coating comprising a sub-atomiclayer of transparent conductor. In one embodiment, the resistivity ofthe continuous or patterned anti-static layer is between 1×10⁴ ohms persquare and 1×10¹⁰ ohms per square. In one embodiment, a thickness of thecontinuous or patterned anti-static layer is less than 10 microns. Inone embodiment, the real part of the dielectric constant of thecontinuous or patterned anti-static layer is between 2.5 and 4. In oneembodiment, the optical index of the continuous or patterned anti-staticlayer is between 1.5 and 2.5 or where the optical transmission of thecontinuous or patterned anti-static layer is greater than 90% betweenthe wavelengths of 450 nm and 650 nm. One embodiment further comprisesan organic insulating layer positioned between the array and theanti-static coating. In one embodiment, the organic insulating layer hasa dielectric constant less than 3.0. In one embodiment, the continuousor patterned anti-static layer is connected to one or more conductivetraces in the radiographic imaging array.

In one embodiment, the conductive traces are positioned external to theradiographic imaging array, and further comprising vias in insulatinglayers between the continuous or patterned anti-static layer and theconductive traces. In one embodiment, the conductive traces arepositioned within one or more pixels of the radiographic imaging array,and further comprising vias in insulating layers between the continuousor patterned anti-static layer and the conductive traces at connectionsites, where the continuous or patterned anti-static layer is connectedto the conductive traces at the connection sites. In one embodiment, theconductive traces are positioned between one or more pixels of theradiographic imaging array, and further comprising vias in insulatinglayers between the continuous or patterned anti-static layer and theconductive traces at connection sites, where the continuous or patternedanti-static layer is connected to the conductive traces at theconnection sites. In one embodiment, the conductive traces comprise oneof the bias lines providing voltage to an element of the pixel or commonphotodiode bias lines, and further comprising vias in insulating layersbetween the continuous or patterned anti-static layer and the conductivetraces at connection sites, where the continuous or patternedanti-static layer is connected to the conductive traces at theconnection sites. In one embodiment, the conductive traces are separatedby at least 16 rows or 16 columns of pixels, and where a number ofconnection sites comprising vias in insulating layers between thecontinuous or patterned anti-static layer and the conductive traces isless than 6% of the number of pixels in the radiographic imaging array.

In one embodiment, the anti-static layer is patterned in registration tothe portion of the imaging pixels. In one embodiment, the patternedanti-static coating selectively covers the photosensor withoutsubstantially covering the readout element or a conductive traceincluding a data line. In one embodiment, the patterned anti-staticcoating selectively covers the photosensor and covers at least one ofthe dataline by less than 50% of the pixel dimension and the gateline byless than 50% of the pixel dimension. In one embodiment, the patternedanti-static layer contains a colorant. In one embodiment, the colorantcomprises one or more of a pigment, a dye, a substantially opaquematerial, or is substantially opaque to light between 450 nm and 650 nm.In one embodiment, the patterned anti-static layer is configured tosubstantially cover the portion of the photodiode not covered by theanode. In one embodiment, the patterned anti-static layer is configuredto substantially cover the channel region of the one or more transistorsin the readout circuit.

In one embodiment, the first dielectric layer is substantiallytransparent to visible light with wavelength between 450 nm and 650 nm,and an average refractive index of the dielectric layer is between 1.4and 1.8. In one embodiment, the first dielectric layer is substantiallytransparent to visible light with wavelength between 450 nm and 650 nm,and where the second dielectric layer is substantially opaque to visiblelight with wavelength between 450 nm and 650 nm. In one embodiment, athickness of the first dielectric is less than one-half of the thicknessof the second dielectric, or a thickness of the first dielectric is lessthan 10 microns. In one embodiment, a scintillator can be deposited onthe imaging array, deposited by evaporation on the imaging array,attached to the imaging array, attached by thermal setting to theimaging array, attached by an adhesive to the imaging array, or pressedto the imaging array, where the scintillator is CsI deposited on theimaging array or where the scintillator is coated on the array, wherethe coated scintillator comprises an organic binder and phosphorparticles.

In certain exemplary embodiments, digital radiographic imaging detectorscan include thin-film elements such as but not limited to thin-filmphotosensors and thin-film transistors. Thin film circuits can befabricated from deposited thin films on insulating substrates as knownto one skilled in the art of radiographic imaging. Exemplary thin filmcircuits can include amorphous-silicon devices such as a-Si PIN diodes,schottky diodes, MIS photocapacitors, and be implemented using amorphoussemiconductor materials or polycrystalline semiconductor materials suchas silicon.

While the invention has been illustrated with respect to one or moreimplementations, alterations and/or modifications can be made to theillustrated examples without departing from the spirit and scope of theappended claims. In addition, while a particular feature of theinvention can have been disclosed with respect to only one of severalimplementations, such feature can be combined with one or more otherfeatures of the other implementations as can be desired and advantageousfor any given or particular function. The term “at least one of” is usedto mean one or more of the listed items can be selected. The term“about” indicates that the value listed can be somewhat altered, as longas the alteration does not result in nonconformance of the process orstructure to the illustrated embodiment. Finally, “exemplary” indicatesthe description is used as an example, rather than implying that it isan ideal. Other embodiments of the invention will be apparent to thoseskilled in the art from consideration of the specification and practiceof the invention disclosed herein. It is intended that the specificationand examples be considered as exemplary only, with a true scope andspirit of the invention being indicated by the following claims.

The invention claimed is:
 1. A radiographic imaging apparatus,comprising: an insulating substrate; a radiographic imaging array overthe insulating substrate, the radiographic imaging array comprisingimaging pixels disposed in a two dimensional arrangement of rows andcolumns, each imaging pixel comprising at least one readout element, adata line, and one photosensor; an insulating layer over at least aportion of the imaging pixels; a scintillator over the imaging array,the scintillator to convert radiographic radiation to visible light; andan anti-static layer disposed between the insulating layer and thescintillator, wherein the anti-static layer is formed as a singlecontinuous conductive layer over a plurality of adjacent ones of theimaging pixels, the anti-static layer is selectively patterned to coverthe photosensors of each of the adjacent imaging pixels, the anti-staticlayer is selectively patterned to substantially not cover the readoutelement and the data line of each of the adjacent imaging pixels, andwherein the anti-static layer is electrically connected to anelectrostatic discharge protection circuit.
 2. The radiographic imagingapparatus of claim 1, wherein a thickness of the patterned anti-staticlayer is less than 10 microns, a real part of the dielectric constant ofthe patterned anti-static layer is between 2.5 and 3.4, an optical indexof the patterned anti-static layer is between 1.5 and 2.5, or wherein anoptical transmission of the patterned anti-static layer is greater than90% between the wavelengths of 450 nm and 650 nm.
 3. The radiographicimaging apparatus of claim 1, wherein the electrostatic dischargeprotection circuit comprises a conductive trace in the radiographicimaging array.
 4. The radiographic imaging apparatus of claim 3, whereinthe patterned anti-static layer is electrically connected to theconductive trace using a via through the insulating layer.
 5. Theapparatus of claim 1, wherein the anti-static layer over eachphotosensor is in electrical communication with the anti-static layerover the photosensor in each of two adjacent pixels in a same column. 6.The apparatus of claim 1, wherein the anti-static layer over eachphotosensor is in electrical communication with the anti-static layerover the photosensor in each of four adjacent pixels.
 7. The apparatusof claim 1, wherein the anti-static layer is selectively patterned toinclude wide portions, the wide portions extend in a same dimension asan exposure area of the photosensors of each of the adjacent imagingpixels, the wide portions cover the photosensors of each of the adjacentimaging pixels and do not extend between the adjacent imaging pixels,the anti-static layer is selectively patterned to include narrowportions narrower than the wide portions, the narrow portions extendingbetween the adjacent imaging pixels.
 8. A method of manufacturing aradiographic imaging apparatus, the method comprising: forming aninsulating substrate; forming a radiographic imaging array over theinsulating substrate, the imaging array comprising imaging pixelsdisposed in a two dimensional arrangement of rows and columns, eachimaging pixel comprising at least one readout element, a data line, andone photosensor, including forming the at least one photosensor as apolycrystalline photosensor or an amorphous photosensor; forming ascintillator over the imaging array to convert radiographic radiation tovisible light; and forming an anti-static layer between the radiographicimaging array and the scintillator, including forming the anti-staticlayer as a single continuous conductive layer over a plurality ofadjacent ones of the imaging pixels, patterning the anti-static layer tocover the photosensors of each of the adjacent imaging pixels pixel inthe imaging array and to leave substantially not covered the readoutelement and the data line of each of the adjacent imaging pixels pixel,and electrically connecting the anti-static layer to a voltage terminalhaving a preselected voltage level.
 9. The method of claim 8, furthercomprising patterning the anti-static layer into wide portions coveringan exposure area of the photosensors of each of the adjacent imagingpixels, patterning the anti-static layer into narrow portions narrowerthan the wide portions, the narrow portions extending between theadjacent imaging pixels and not covering the photosensors of each of theadjacent imaging pixels.
 10. A radiographic imaging apparatus,comprising: an insulating substrate; a radiographic imaging array formedover the insulating substrate, the radiographic imaging array comprisingimaging pixels disposed in a two dimensional arrangement of rows andcolumns, each imaging pixel comprising at least one readout element, adata line, and one photosensor; a scintillator over the imaging array toconvert radiographic radiation into visible light; and an anti-staticlayer disposed between the radiographic imaging array and thescintillator, wherein the anti-static layer is formed as a singlecontinuous conductive layer over a plurality of adjacent ones of theimaging pixels, the anti-static layer substantially covers an area ofthe photosensor of each of the adjacent imaging pixels, the anti-staticlayer does not cover the readout element and the data line of each ofthe adjacent imaging pixels, and wherein the anti-static layer iselectrically connected to an electrostatic discharge circuit.
 11. Theradiographic imaging apparatus of claim 10, wherein the continuousanti-static layer comprises an organic binder having nano-structuredmaterials therein.
 12. The radiographic imaging apparatus of claim 10,where a resistivity of the continuous anti-static layer is between 1×10⁴ohms per square and 1×10¹⁰ ohms per square.
 13. The radiographic imagingapparatus of claim 10, where a thickness of the continuous anti-staticlayer is less than 10 microns.
 14. The radiographic imaging apparatus ofclaim 10, where the continuous anti-static layer is electricallyconnected to one or more conductive traces in the radiographic imagingarray.
 15. The radiographic imaging apparatus of claim 14, furthercomprising an insulating layer over at least a portion of the imagingpixels, and wherein the continuous anti-static layer is electricallyconnected to the one or more conductive traces using a via through theinsulating layer.
 16. The imaging apparatus of claim 10, wherein theelectrostatic discharge protection circuit comprises a circuit connectedto ground.
 17. The imaging apparatus of claim 10, wherein theelectrostatic discharge protection circuit comprises a circuit connectedto a bias voltage source.
 18. The apparatus of claim 10, wherein theanti-static layer over each photosensor is in electrical communicationwith the anti-static layer over the photosensor in each of two adjacentpixels in a same column.
 19. The apparatus of claim 10, wherein theanti-static layer over each photosensor is in electrical communicationwith the anti-static layer over the photosensor in each of four adjacentpixels.
 20. The apparatus of claim 10, wherein the anti-static layer isselectively patterned to include wide portions, the wide portions extendin a same dimension as an exposure area of the photosensors of each ofthe adjacent imaging pixels, the wide portions cover the photosensors ofeach of the adjacent imaging pixels and do not extend between theadjacent imaging pixels, the anti-static layer is selectively patternedto include narrow portions narrower than the wide portions, the narrowportions extending between the adjacent imaging pixels.